ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.
Status: WithdrawnPublication date: 2003-07
Edition: 1Number of pages: 14
Technical Committee: ISO/TC 112 Vacuum technology
- ICS :
- 23.160 Vacuum technology
ISO 5302:2003Stage: 95.99
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