The considered method of measurement deals with vapours jet vacuum pumps, diffusions pumps and diffusion-ejector pumps. The dependence of the performance of these pumps on the backing pressure can only be completely described be means of a curve relating the inlet and backing pressure over the range of operation. The recommended test dome and the principle of the test equipment are illustrated.
Status: PublishedPublication date: 1989-12
Edition: 2Number of pages: 3
Technical Committee: ISO/TC 112 Vacuum technology
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