Abstract
This document specifies the metrological characteristics of areal instruments for measuring surface topography. Because surface profiles can be extracted from surface topography images, most of the terms defined in this document can also be applied to profiling measurements.
General information
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Status: PublishedPublication date: 2019-02Stage: International Standard published [60.60]
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Edition: 1Number of pages: 21
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Technical Committee :ISO/TC 213ICS :17.040.20
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