Status : Published
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Abstract

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

General information

  • Status
     : Published
    Publication date
     : 2019-03
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 21
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.20 
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