Abstract
This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.
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General information
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Status: PublishedPublication date: 2021-04Stage: International Standard published [60.60]
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Edition: 1Number of pages: 28
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Technical Committee :ISO/TC 202/SC 3ICS :71.040.50
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