International Standard
ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Reference number
ISO 18115-3:2022
Edition 1
2022-06
International Standard
Read sample
ISO 18115-3:2022
76357
Published (Edition 1, 2022)

ISO 18115-3:2022

ISO 18115-3:2022
76357
Language
Format
CHF 42
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Abstract

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

General information

  •  : Published
     : 2022-06
    : International Standard published [60.60]
  •  : 1
     : 35
  • ISO/TC 201/SC 1
  • RSS updates

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