International Standard
ISO 20146:2019
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
Reference number
ISO 20146:2019
ISO 20146:2019
Edición 1
2019-01
2019-01
© ISO 2024
International Standard
Resumen
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2019-01Etapa: Norma Internacional en proceso de revisión sistemática [90.20]
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Edición: 1Número de páginas: 16
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Comité Técnico :ISO/TC 112ICS :23.160
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