Reference number
ISO 20146:2019
International Standard
ISO 20146:2019
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
Edition 1
2019-01
Read sample
ISO 20146:2019
67152
Published (Edition 1, 2019)
This publication was last reviewed and confirmed in 2024. Therefore this version remains current.

ISO 20146:2019

ISO 20146:2019
67152
Language
Format
CHF 96
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Abstract

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

General information

  •  : Published
     : 2019-01
    : International Standard confirmed [90.93]
  •  : 1
     : 16
  • ISO/TC 112
    23.160 
  • RSS updates

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